Effects of rapid thermal annealing on the contact of tungsten/p-diamond

Dengchao Zhao,Fengnan Li,Zongchen Liu,Xudong Chen, Y. Wang,Guoqing Shao,Tianfei Zhu,Min Zhang,Jintao Zhang,Jian Wang,W. Wang,Hongxing Wang

Applied Surface Science（2018）

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摘要

•Contact properties of tungsten on p-type single crystal diamond have been investigated.•The specific contact resistance was extracted from fitting the I-V relationship of TLM.•The XPS measurements was used to explain the contact mechanism.•The tungsten carbide formation in W/p-diamond interface contributed to ohmic contact.

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关键词

Diamond,I-V,Ohmic contact,TLM,XPS,Barrier height

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