Thermomechanically Tunable Infrared Metamaterials Using Asymmetric Split-Ring Resonators

Journal of Microelectromechanical Systems(2017)

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摘要
We demonstrate a nanoelectromechanical systems-based tunable infrared metamaterial formed with an array of Au/Si bilayer split-ring resonators having two asymmetric arms. The wider arm of the resonator is anchored on the substrate, while the thinner one is free to bend in vertical direction by varying temperature. The bending of the thin arm changes the air gap between the two arms, and thus modul...
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关键词
Metamaterials,Magnetic materials,Nanoelectromechanical systems,Substrates,Thermal management,Resonators,Temperature measurement
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