A test structure to characterize transparent electrode array platform with TFTs for bio-chemical applications

2017 International Conference of Microelectronic Test Structures (ICMTS)(2017)

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摘要
Test structures are proposed to characterize Thin-Film-Transistors in array that control a transparent electrode array platform, used for bio-chemical applications. The structures are post-processed electrodes that connect the source terminals of multiple TFTs. This characterization is essential to determine the limits, in terms of sensitivity and operation frequency in the case of impedance measurements on biological cells, as well to investigate other possible biological applications.
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关键词
transparent electrode array,TFT,bio-chemical applications,thin-film-transistors,impedance measurements,biological cells
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