基于微机电系统的法布里珀罗可调光滤波器 Guo Zhihui, Li Yonghua,Yang Heng,Zhong ShaolongChinese Journal of Lasers(2017)引用 0|浏览4关键词fiber optics,micro-electro mechanical systems,Fabry-Perot cavity,tunable optical filter,electrostatic driveAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要