Enhanced-oxidation of Si and 4H-SiC using Alkaline earth metal Kousuke Muraoka,Hiroshi Sezaki,Seiji Ishikawa,Tomonori Maeda,Takamaro Kikkawa,Shin-Ichiro KurokiThe Japan Society of Applied Physics(2016)引用 23|浏览6暂无评分关键词enhanced-oxidation,h-sicAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要