Particle detectors based on 4H-SiC epitaxial layer and their properties
2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM)(2016)
摘要
We fabricated and characterized 4H-SiC Schottky diodes as a spectrometric detector of a-particles. A Schottky contact of Ni/Au of 1.4 mm in diameter was used. Current-voltage characteristics of the detector were measured and a current density lower than 25 nAcm
-2
was observed at room temperature. A
226
Ra used as a source of a-particles within the energy range between 4.6 MeV and 7.7 MeVfor detector testing. The energy resolution below 48 keV was measured for 7.7 MeV a-particles. The detector was irradiated by
132
Xe
23+
ions with energy of 165 MeV and fluencies of 5×10
9
cm
2
and 1.5× 10
10
cm
2
. Spectra of α-particles were measured after irradiation and significant degradation of energy resolution was observed.
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关键词
epitaxial layer,Schottky diode,spectrometric detector,α-particle detector,Schottky contact,current-voltage measurement,current density,size 1.4 mm,temperature 293 K to 298 K,electron volt energy 4.6 MeV to 7.7 MeV,electron volt energy 165 MeV,SiC
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