Chemical Vapor Deposition of Phase-Pure Uranium Dioxide Thin Films from Uranium(IV) Amidate Precursors.

Mark D Straub,Jennifer Leduc,Michael Frank,Aida Raauf,Trevor D Lohrey,Stefan G Minasian,Sanjay Mathur,John Arnold

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION（2019）

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摘要

Homoleptic uranium(IV) amidate complexes have been synthesized and applied as single-source molecular precursors for the chemical vapor deposition of UO2 thin films. These precursors decompose by alkene elimination to give highly crystalline phase-pure UO2 films with an unusual branched heterostructure.

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关键词

Actinides,Chemical vapor deposition,Inorganic materials,Thin films,Uranium

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