Design, Preparation, and Performance of a Planar Ignitor Inserted With PyroMEMS Safe and Arm Device
Journal of Microelectromechanical Systems(2018)
摘要
A planar ignitor-based on low temperature co-fired ceramic (LTCC) and pyrotechnical micro electro mechanical system (PyroMEMS) technologies was designed and prepared in this paper. The planar ignitor is mainly composed of output charge layer, silicon safe and arm (Si-S&A) layer, and LTCC circuit base. Si/Pb3O4, C6H2(NO2)3OK/KClO4, and B/KNO3 were selected as ignition charge, gas charge, and transf...
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关键词
Ceramics,Silicon,Ignition,Resistors,Performance evaluation
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