Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy

Abstract The technique of micro-laser-induced breakdown spectroscopy (μLIBS) usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to conventional laser-induced breakdown spectroscopy (LIBS), it can provide more abundant form, structure, and content information on a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of μLIBS in the selection of laser source and the structure of optical path system is introduced, and its application in metal, semiconductor, animal and plant fields is reviewed. The existing problems and potential development direction is pointed out.