Blocking Flying Crosstalk in BEOL Validated in Antenna Switches in 45-nm SOI CMOS

Flying crosstalk through the back-end-of-the-line (BEOL) above the silicon substrate is an emerging design challenge to RF ICs, which cannot be addressed by conventional in-Si noise reduction structures. This letter reports a new concept of using in-BEOL metal wall structures, implemented by 3-D heterogeneous integration, to efficiently suppress the above-Si flying global crosstalk. It was validat...