Silicon Tunnel Junctions Produced by Ion Implantation and Diffusion Processes for Tandem Solar Cells

This work reports on the fabrication of silicon tunnel junctions that can be used in silicon-based bottom cells for tandem solar cells. The tunnel junction was formed on n-type monocrystalline silicon wafers using the following two different processes: (1) a thermal diffusion of boron followed by an arsenic ion implantation; and (2) successive implantation steps of boron and arsenic ions. For both...