Ultrahigh Sensitivity to Strain of Cracked Thin Films Based on Metallic Nanoparticles in a Dielectric Matrix

Etienne Puyoo,Solène Brottet,Remi Rafael,Christophe Malhaire

IEEE Sensors Letters（2018）

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摘要

Platinum nanoparticle-based strain gauges are elaborated by means of atomic layer deposition on flexible polyimide substrates. Their electromechanical response is tested under mechanical bending at strain levels up to 1%. Sudden changes in electrical resistance are observed above 0.6% strain when straight cracks are formed in the nanostructured thin film. Scanning electron microscope (SEM) experim...

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关键词

Nanoparticles,Mechanical sensors,Strain measurement,Atomic layer deposition,Sensitivity

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