Fluorinated tin oxide (FTO) deposited at room temperature: Influence of hydrogen and oxygen in the sputtering gas on the optical and electrical properties

María Morán-Pedroso,Jorge Sánchez-Marcos,Alicia de Andrés,Carlos Allende Prieto

Applied Surface Science（2018）

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摘要

•Effect of hydrogen, oxygen and argon mixed gas in FTO sputtered films.•Room temperature deposited FTO with excellent transparency and very good resistance.•Rutherford backscattering spectroscopy characterization FTO films.•Model that explain the optical and electrical properties with hydrogen content.

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关键词

Transparent conductive materials,Room temperature film preparation

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