Thermal Marangoni-driven Dynamics of Spinning Liquid Films
PHYSICAL REVIEW FLUIDS(2018)
摘要
Spin coating of thin films of viscous liquids on a rotating substrate is a core technological component of semiconductor microchip fabrication. The thinning dynamics is influenced by many physical processes. Specifically temperature gradients affect thin liquid films through their influence on the local fluid surface tension. We show here experimentally and numerically that adding a static temperature gradient has a significant effect on the equilibrium film thickness and height profile reached in spin coating. Our results suggest that thermal gradients can be used to control film height profile dynamics.
更多查看译文
关键词
liquid films,marangoni-driven
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要