A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer

In this paper, we present a capacitive, MEMS-based accelerometer comprising an ultra-low noise CMOS integrated readout-IC and a high-precision bulk micro machined sensing element. The resulting accelerometer reaches an acceleration equivalent noise of only 200 ng/√Hz, which makes it suitable for seismic measurement that require noise levels significantly below 1 μg/√Hz. In addition, a high bandwid...