Influence of thickness and microstructure on thermoelectric properties of Mg-doped CuCrO 2 delafossite thin films deposited by RF-magnetron sputtering

Inthuga Sinnarasa,Yohann Thimont,Lionel Presmanes,Corine Bonningue,Antoine Barnabé,Philippe Tailhades

Applied Surface Science（2018）

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摘要

•Various thickness CuCrO2:Mg thin films were elaborated using RF sputtering.•Electrical resistivity versus film thickness showed a non-conform variation.•The hole hopping transport type has been identified in this material.•Seebeck coefficient and electrical conductivity depend on the microstructure.•The power factor of 100 nm thick film is 59 µW·m−1 K−2 at 200 °C.

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关键词

Thermoelectric thin film,Microstructure/thickness dependence,Delafossite,Radio-frequency sputtering,Hopping transport

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