Effects of metallic interlayers on the performance of nanocrystalline diamond metal-semiconductor-metal photodetectors

Applied Surface Science(2018)

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摘要
•The MSM photodetectors have successfully prepared using nanocrystalline diamond (NCD) films and metallic layers.•The metallic interlayers reduce the surface roughness of the fabricated NCD films from 8.3 nm to 4.7 nm.•The W/NCD/W MSM photodetector possesses a high photo-to-dark current ratio about 3 orders of magnitude.
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关键词
Nanocrystallinediamond,Metal-semiconductor-metal,Microwave plasma jet chemical vapor deposition,Photodetectors,Metallic interlayers
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