LC Filters for FDM Readout of the X-IFU TES Calorimeter Instrument on Athena

The current status of lithographic superconducting LC filters for use in the Athena-X-IFU instrument is described. We present the fabrication process and characterization results at room temperature, 4 K and 50 mK. We also present an optimization study of the quality topics, where finite element modeling is used together with experimental validation structures. For the a-Si:H-based capacitors and Nb-based coils, presently the component fabrication yield is about 99% and the effective series resistance at 50 mK is lower than 1.5 mΩ.