6H-SiC-Fe Nanostructures Studied by Atom Probe Tomography

Lindor Diallo,Abdeslem Fnidiki,Luc Lechevallier, Amjaad Zarefy,Jean Juraszek,Fabien Cuvilly,Ivan Blum,M. Viret,Marc Marteau,D. Eyidi,A. Declémy

IEEE Magnetics Letters（2018）

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摘要

Low-dose (2 at.%) Fe implantation in 6H-SiC (0001), followed by high-temperature annealing, is investigated with the aim of obtaining a diluted magnetic semiconductor (DMS). The effects of rapid thermal annealing on the microstructure were examined by atom probe tomography. The study shows the evidence of the formation of nanoclusters after annealing, some of which are magnetic. The structural stu...

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关键词

Iron,Silicon carbide,Annealing,Silicon,Chemicals,Nanoparticles,Probes

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