Multi-contact radiofrequency microelectromechanical systems switch with power divider/combiner structure for high power applications

Design, fabrication, and measurement of a metal-contact radiofrequency (RF) microelectromechanical systems switch with a power divider/combiner structure for high power applications are presented in this work. The multi-contact switch with parallel cantilever beams is implemented in a Y-junction power divider/combiner, which suppresses the uneven current distribution through each contact and resul...