Gas Sensing Using Heterogeneously Integrated Quantum Cascade Lasers On Silicon

Christopher C. Evans,Alexander Spott,Charles D. Merritt, W. W. Bewley,I. Vurgaftman,Chul Soo Kim,Jerry R. Meyer,Joel M. Hensley,John E. Bowers,Michael B. Frish

2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2018）

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摘要

We demonstrate tunable diode-laser absorption spectroscopy (TDLAS) gas sensing near 4.8 mu m using a distributed-feedback quantum cascade laser heterogeneously integrated on a silicon-on-nitride-on-insulator platfoun. This platfoun enables sensors operating at wavelengths up to 6.7 mu m.

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关键词

tunable diode-laser absorption spectroscopy gas sensing,distributed-feedback quantum cascade laser,silicon-on-nitride-on-insulator platform,heterogeneously integrated quantum cascade lasers,Si-S3N4

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