Challenges in Silicon Photonics Process Technology

Frederic Boeuf,Nathalie Vulliet,Charles Baudot,Sonia Messaoudene,Elise Baylac,Sebastien Cremer

43RD EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC 2017)（2017）

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摘要

In this paper we discuss the specific challenges of process integration of Si-Photonics for the current and future applications, including lithography, etching and heterogeneous materials integration.

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关键词

heterogeneous materials integration,silicon Photonics process technology,Si

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