High resolution photolithography for direct view active matrix organic light-emitting diode augmented reality displays: Organic light-emitting diode lithography as enabler for hi-res displays

High-resolution RGB organic light-emitting diode frontplane is a key enabler for direct-view transparent augmented reality displays. In this paper, we demonstrate 1250ppi passive displays and semi-transparent active displays. Organic light-emitting diode photolithography can provide pixel density above 1000ppi while keeping effective emission area high because of high aperture ratio. Patterns with 2m line pitch were successfully transferred to emission layers, indicating possible further pixel density scaling. Lifetime after patterning, key parameter enabling industrialization, is above 150h (T90 at 1000 nit).