Identification of higher order silanes during monosilane pyrolysis using gas chromatography-mass spectrometry

Guro Marie Wyller,Thomas J. Preston,Hallgeir Klette,Trygve Mongstad,Erik Stensrud Marstein

Journal of Crystal Growth（2018）

引用 1|浏览10

暂无评分

摘要

•Novel GC-MS instrument for detection higher order silanes.•Previously unpublished mass spectra of six tetra- and pentasilane isomers presented.•GC-MS demonstrated for in-situ measurements of model Si production reactor exhaust.

查看译文

关键词

A1. Fluid flows,A1. Growth models,A1. Nucleation,A2. Growth from vapor,A3. Chemical vapor deposition processes,A3. Polysilicon production processes

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要