The Investigation Of Three Types Of Comb-Drive Actuator For Mems Inclinometer

Kyaw Myo Aung,Boris M Simonov,Victor Kalugin,Kyaw Zin Linn

PROCEEDINGS OF THE 2018 IEEE CONFERENCE OF RUSSIAN YOUNG RESEARCHERS IN ELECTRICAL AND ELECTRONIC ENGINEERING (EICONRUS)（2018）

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摘要

To improve the sensitivity of the MEMS comb - drive inclinometer three shapes of the comb-drive: ordinary, triangular and curve were investigated. We used typical folded beam for displacement of rotor part. By calculating the results in ANSYS, the change of capacitance in curve shape comb-drive is more than in the other shapes. And the quality factor of curve shape actuator is higher than in other shape actuator. The curve shape comb-drive is more suitable for getting higher sensitivity for comb-drive MEMS inclinometer.

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关键词

comb-drive inclinometer, folded beam, ordinary, triangular, curve, displacement, the change of capacitance

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