A Novel Variation of Lateral Doping Technique in SOI LDMOS With Circular Layout

The breakdown characteristics of a practical silicon-on-insulator (SOI) lateral power device are generally limited by the 3-D curvature effect induced by its circular layout. The Conventional 2-D design methods such as 2-D variation of lateral doping (VLD) technique cannot derive optimal device parameters. In this paper, for the first time, a 3-D VLD technique is proposed to suppress the 3-D curva...