Study of showerhead nozzle configuration in vertical HVPE reactor for large size bulk GaNQiang Liu,N. Fujimoto,Shugo Nitta, Yashio Honda,Hiroshi AmanoThe Japan Society of Applied Physics(2018)引用 23|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要