Multi-physics simulations of high temperature CVD processes of SiC Ryosuke Ohshima,Subaru Komura, Kento Kawakami,Yoshihiro Yamamoto, Kenta Chokawa, Katsunori Yoshimatsu,Naoya Okamoto,Emi Makino,Norikazu Hosokawa,Shoichi Onda,Yoshihiro Kangawa,Koichi Kakimoto,Kenji ShiraishiThe Japan Society of Applied Physics（2018）引用 23|浏览15暂无评分关键词high temperature cvd processes,multi-physicsAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
