Piezoelectric tuning of a suspended silicon nitride ring resonator

Warren Jin,Eric J. Stanton,Nicolas Volet,Ronald G. Polcawich,Doug Baney,Paul A. Morton,John E. Bowers

2017 IEEE Photonics Conference (IPC)（2017）

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摘要

A novel piezoelectric actuator is fabricated on a suspended silicon nitride ring resonator to tune the optical resonance via mechanical deformation. Fabricated devices exhibit tuning across a full free spectral range by applying 16 V across the piezoelectric.

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关键词

suspended silicon nitride ring resonator,optical resonance,piezoelectric tuning,piezoelectric actuator,mechanical deformation,voltage 16.0 V,Si3N4

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