Edge reflection type SAW resonators on silicon substrate using ZnO thin films

In general surface acoustic wave (SAW) devices are made on piezoelectric substrates, hence difficult to integrate with circuits made on silicon. SAW devices can be realized on a silicon substrate using a film of piezoelectric material in conjunction with interdigital transducers (IDT) facilitating monolithic integration of SAW devices with circuits. Normally, SAW resonators consist of reflector gratings with large number of fingers to form standing waves and to confine SAW, and consume significant die area. The objective of the paper is to explore implementation of edge reflection (ER) type SAW devices, which are extremely compact, on silicon substrate.