Channel Material Dependence of Wave Function Deformation Scattering in Ultrascaled FinFETs

Michael Wong,Kyle David Holland,Ji Kai Wang,Thomas Cam,Terence B. Hook,Diego Kienle,Prasad S. Gudem,Mani Vaidyanathan

IEEE Transactions on Electron Devices（2017）

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摘要

We investigate the channel material dependence of wave function deformation scattering (WDS), a phenomenon that occurs when the shape of the carrier wave function is forced to change as the channel is traversed. Line-edge roughness (LER) is one nonideality that can induce WDS in confined device geometries. We perform nonequilibrium Green's function simulations of ensembles of ultrascaled Fin Field...

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关键词

Wave functions,Effective mass,FinFETs,Green's function methods

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