Quantitative comparison of simulated and measured signals in the STEM mode of a SEM

C.G.H. Walker,Ivo Konvalina,Filip Mika,Lud v{e}k Frank,Ilona Müllerová

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2018）

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摘要

The transmission of electrons with energies 15 keV and 30 keV through Si and Au films of 100 nm thickness each have been studied in a Scanning Transmission Electron Microscope. The electrons that were transmitted through the films were detected using a multi-annular photo-detector consisting of a central Bright Field (BF) and several Dark Field (DF) detectors.

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