Electrical trimming of the resonance of a silicon micro-ring resonator
2017 IEEE 14th International Conference on Group IV Photonics (GFP)（2017）
摘要
Post-fabrication trimming of a silicon micro-ring resonator is demonstrated using an electrically mediated process. The resonance of a fully fabricated ring is permanently blue-shifted by 240pm after diffusion from local reservoirs of boron dopant. Thermal energy is supplied by an integrated heater.
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关键词
silicon modulator,resonance control,defect-mediated-photon-absorption
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