Comparison of line-wise pl-imaging and area-wise pl-imaging

Hannes Höffler,Georg Dost,Andreas Brand,Jonas Haunschild, Hans Schremmer, Andreas Bergmann

Energy Procedia（2017）

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摘要

In this contribution we compare the results of a line-scanning camera and line-wise illumination based PL-imaging system (Line-PLI) to the results of a “classic” PL-imaging system featuring a matrix camera and a full area illumination of the wafer.

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关键词

Photoluminescence-imaging,Characterization,Process control

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