Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)Tetsuhide Shimizu,Michelle Marie S. Villamayor,Julien Keraudy,Daniel Lundin,Ulf HelmerssonJournal of The Vacuum Society of Japan(2017)引用 3|浏览5暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要