Optimization of the batch production of silicon fiber-top MEMS devices

We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. The procedure relies on the approach introduced earlier by our group (Gavan et al 2011 Opt. Lett. 36 2898-900), which has been optimized here to obtain higher yield and increased reliability. We describe in details the eight steps of the procedure and we show its application to the fabrication of several cantilever-based structures. Overall, we report a process yield of 80% functioning MEMS devices in our final batch.