Quantitative analysis of Si1-xGex alloy films by SIMS and XPS depth profiling using a reference material
Applied Surface Science(2018)
摘要
•Quantitative analysis methods of multi-element alloy films were investigated.•The RSFs were determined from a reference alloy film by the conventional method, average intensity method and total number counting method.•In XPS analysis, the measurement uncertainty was highly improved by the AI method and TNC method.
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关键词
Quantitative analysis,Si1-xGex alloy,SIMS,XPS,Depth profiling
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