Wafer-Level Integration of an Advanced Logic-Memory System Through the Second-Generation CoWoS Technology
IEEE Transactions on Electron Devices(2017)
摘要
State-of-the-art silicon interposer technology of chip-on-wafer-on-substrate (CoWoS) containing the second-generation high bandwidth memory (HBM) has been applied for the first time in fabricating high-performance wafer-level system-in-package. An ultralarge Si interposer up to 1200 mm2 made by a two-mask stitching process is used to form the basis of the second-generation CoWoS (CoWoS-2) to accom...
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关键词
Silicon,Through-silicon vias,Metals,Stress,Bandwidth,Routing
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