On-Chip Feedthrough Cancellation Methods for Microfabricated AFM Cantilevers With Integrated Piezoelectric Transducers

Active microcantilevers with on-chip sensing and actuation capabilities provide significant advantages in tapping-mode atomic force microscopy. The collocated transduction in active cantilevers enables effective control of their dynamics, allowing for the modification of the quality (Q) factor and operation at higher flexural modes to obtain higher scan rates. However, having closely spaced transd...