Improving crystallization and electron mobility of indium tin oxide by carbon dioxide and hydrogen dual-step plasma treatment

Fengyou Wang,Rongchi Du,Qianshang Ren,Changchun Wei,Ying Zhao,Xiaodan Zhang

Applied Surface Science（2017）

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摘要

•ITO films with high mobility are prepared with reactive thermal evaporation (RTE).•CO2+H2 two-step plasma treatment are proposed for RTE ITO films.•Mobility of ∼100nm thick ITO films is improved more than 80cm2/Vs.•High mobility RTE ITO is used to improve the performance of solar cell.

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关键词

Photo-electronic devices,Indium tin oxide films,Plasma treatment,Electron mobility,Reactive thermal evaporation

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