Structural Examination of Multilayer CrAlSiN/AlSiN Coatings Deposited by Cathodic Arc

In this research, the possibility of applying multilayer multielement super hard coatings by Cathodic Arc is investigated. More precisely the structure of the coating consisting of quaternary CrAlSiN and ternary AlSiN layers is examined by electron microscopy, X-ray diffraction and X-ray photoelectron microscopy analytical methods. The as-deposited samples were found to have distinguishable layers. The CrAlSiN layer is characterized by an extra sequence of repeated nanolayers. The AlSiN layer consisted of nanosized grains having a preferential orientation. Finally the surface layer was found to contain a solid solution of CrxAl1-xN, while Si3N4 was identified only by XPS most probably due to its amorphous structure.