A design of the combinatorial molecular layer deposition system for high-throughput screening of organic-inorganic hybrid materials

Kazuhiro Kawashima,Yuji Okamoto,Yoshikazu Suzuki,Kenji Itaka,Nobuyuki Matsuki,Masatomo Sumiya, Haruo Nagasawa, Toshihiro Sato, Setsu Suzuki,Hideomi Koinuma

The Japan Society of Applied Physics(2016)

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