Geometry-Based Tunability Enhancement of Flexible Thin-Film Varactors

Stefan Knobelspies, C. Gonnelli,Christian Vogt,Alwin Daus,Niko Münzenrieder,Gerhard Tröster

IEEE Electron Device Letters（2017）

引用 7|浏览17

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摘要

In this letter, flexible voltage-controlled capacitors (varactors) based on an amorphous Indium-Gallium-Zinc-Oxide (a-IGZO) semiconductor are presented. Two different varactor designs and their influence on the capacitance tuning characteristics are investigated. The first design consists of a top electrode finger structure which yields a maximum capacitance tunability of 6.9 at 10 kHz. Second, a ...

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关键词

Varactors,Electrodes,Capacitance,Capacitance-voltage characteristics,Frequency measurement,Semiconductor device measurement,Fabrication

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