Displacement Damage Dose and Implantation Temperature Effects on the Trapping and Release of Deuterium Implanted into SiC
Journal of Nuclear Materials（2017）
Key words
Deuterium implantation,SiC,Displacement damage,Thermal annealing,Hydrogen,Desorption,Trapping
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined