A stochastic model for impact of LER on BEOL TDDB
international reliability physics symposium, 2017.
TDDB lifetime projections at operating voltages for backend of line (BEOL) dielectrics have been based on accelerated testing at high fields and extrapolation to operating conditions based on electric field dependent dielectric wear-out models. A major complication in this approach is the impact of line-edge roughness (LER) which can lead...More
Full Text (Upload PDF)
PPT (Upload PPT)