Optical Stimulation Effects on TiO 2 Sensor Dielectric Used in Capacitively-Coupled High-Density CMOS Microelectrode Array

The effect of optical stimulation of neural tissue is considered in capacitively coupled CMOS microelectrode arrays used for in vitro extracellular recording from neural tissue. Using a 25-nm high-k TiO2 sensor dielectric with 20% ZrO2, light-induced currents through the dielectric are found at short wavelengths within the visible and relevant spectrum for the above-mentioned purpose. Purely capac...