A tool for aided multi-scale model derivation and its application to the simulation of a micro mirror array

2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)(2017)

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摘要
Modeling the electric field in a matrix of micro-mirrors is presented as the first application of the MEMSALab software package. The latter is dedicated to semi-automated derivation of multiscale models by asymptotic methods and will complement simulation software as finite element software. It is designed according to a principle of reusability which is called the extension-combination method developed with techniques derived from the theory of rewriting.
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关键词
Rewriting Strategies,Periodic Homogenization,Micro-Mirror Array,Extension-Combination Method
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