Nanolithography toolbox: Device design at the nanoscale

Krishna C. Balram,Daron A. Westly,Marcelo I. Davanco,Karen E. Grutter,Qing Li,Thomas Michels, C. H. Ray,L. Yu, R. J. Kasica,Christopher B. Wallin, I. J. Gilbert, Brian A. Bryce, G. Simelgor, J. Topolancik,Nicolae Lobontiu,Yuxiang Liu,P. Neuzil,Vojtech Svatos, K. A. Dill, N. A. Bertrand,Meredith Metzler,Gerald G Lopez,David A. Czaplewski,Leonidas E. Ocola,Kartik Srinivasan,Samuel M. Stavis,Vladimir A. Aksyuk,James A. Liddle,Slava Krylov,B. R. Ilic

2017 Conference on Lasers and Electro-Optics (CLEO)（2017）

引用 0|浏览1

暂无评分

摘要

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

查看译文

关键词

platform-independent software package,Nanolithography Toolbox,device design,nanoscale device fabrication,microscale device fabrication,nanometer scaled device architectures

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要