High-Performance GaN-Based LEDs With AZO/ITO Thin Films as Transparent Contact Layers

The Al-doped ZnO (AZO)/indium tin oxide (ITO) bilayer films were proposed as transparent contact layers (TCLs) for the fabrication of GaN-based light-emitting diodes (LEDs). In TCLs on the p-type GaN layer, the ITO film serves as the ohmic contact layer with the thickness of only 20 nm, whereas the 300-750nm AZO films act as the current spreading layer. At an optimal AZO thickness of 500 nm, GaN-b...