An improved accuracy-measuring method in manufacturing the lead screw of grating ruling engine
Precision Engineering(2017)
摘要
•Analysis is conducted on the influence of the axial displacement error of the lead screw on the transmission precision.•Based on laser interferometer, a new measuring method of the transmission precision of the lead screw is proposed.•This method can remove the axial displacement errors of the lead screw in a real time.•By using proposed method, a lead screw with the periodic error of less than 0.2μm is obtained.•This lead screw is used in grating ruling engine, and a high-quality echelle with an area of 100mm×100mm is ruled successfully.
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关键词
Lead screw,Grating ruling engine,Axial displacement,Error analysis,Non-contact measurement,Laser interferometer
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