An improved accuracy-measuring method in manufacturing the lead screw of grating ruling engine

Precision Engineering(2017)

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摘要
•Analysis is conducted on the influence of the axial displacement error of the lead screw on the transmission precision.•Based on laser interferometer, a new measuring method of the transmission precision of the lead screw is proposed.•This method can remove the axial displacement errors of the lead screw in a real time.•By using proposed method, a lead screw with the periodic error of less than 0.2μm is obtained.•This lead screw is used in grating ruling engine, and a high-quality echelle with an area of 100mm×100mm is ruled successfully.
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关键词
Lead screw,Grating ruling engine,Axial displacement,Error analysis,Non-contact measurement,Laser interferometer
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